IPAC2015 - List of Authors (Stenning, G.B.G.)

Paper	Title	Page
WEPHA058	Superconducting Coatings Synthesized by CVD/PECVD for SRF Cavities	3246
	P. Pizzol, P. Chalker, T. Heil The University of Liverpool, Liverpool, United Kingdom A.N. Hannah, O.B. Malyshev, S.M. Pattalwar, R. Valizadeh STFC/DL/ASTeC, Daresbury, Warrington, Cheshire, United Kingdom G.B.G. Stenning STFC/RAL/ISIS, Chilton, Didcot, Oxon, United Kingdom
	Funding: STFC Bulk niobium cavities are widely employed in particle accelerators to create high accelerating gradient despite their high material and operation cost. In order to reduce this cost, thin layer of niobium are deposited on a copper cavity, which has lower material cost with higher availability and more importantly higher thermal conductivity. The coating of superconducting cavities currently is synthesized by physical vapour deposition (PVD) method which suffers from lack of conformity. By using chemical vapour deposition (CVD) and plasma enhanced chemical vapour deposition (PECVD) it is possible to deposit thin Nb layers uniformly with density very close to bulk material. This project explores the use of PECVD / CVD techniques to deposit metallic niobium on copper using NbCl5 as precursor and hydrogen as a coreagent. The samples obtained were then characterized via SEM, TEM, SAD, XRD, XPS, and EDX as well as assessing their superconductivity characteristics (RRR and Tc) All the samples deposited are superconductive and polycrystalline; the sample obtained with CVD measured RRR=31 and Tc=7.9 K, while the sample obtained with PECVD exhibited RRR=9 and Tc= 9.4 K. In both cases the films grew in a (100) preferred orientation.
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2015-WEPHA058
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WEPHA059	Physical Vapour Deposition of Thin Films for Use in Superconducting RF Cavities	3249
	S. Wilde, B. Chesca Loughborough University, Loughborough, Leicestershire, United Kingdom A.N. Hannah, D.O. Malyshev, O.B. Malyshev, S.M. Pattalwar, R. Valizadeh STFC/DL/ASTeC, Daresbury, Warrington, Cheshire, United Kingdom G.B.G. Stenning STFC/RAL/ISIS, Chilton, Didcot, Oxon, United Kingdom
	The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. Optimizing superconducting properties of Nb thin-films is therefore essential. Nb films were deposited by magnetron sputtering in pulsed DC mode onto Si (100) and MgO (100) substrates and also by high impulse magnetron sputtering (HiPIMS) onto Si (100), MgO (100) and polycrystalline Cu. The films were characterised using scanning electron microscopy, x-ray diffraction and DC SQUID magnetometry.
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2015-WEPHA059
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

Paper

Title

Page

Superconducting Coatings Synthesized by CVD/PECVD for SRF Cavities

3246

P. Pizzol, P. Chalker, T. Heil
The University of Liverpool, Liverpool, United Kingdom
A.N. Hannah, O.B. Malyshev, S.M. Pattalwar, R. Valizadeh
STFC/DL/ASTeC, Daresbury, Warrington, Cheshire, United Kingdom
G.B.G. Stenning
STFC/RAL/ISIS, Chilton, Didcot, Oxon, United Kingdom

Funding: STFC
Bulk niobium cavities are widely employed in particle accelerators to create high accelerating gradient despite their high material and operation cost. In order to reduce this cost, thin layer of niobium are deposited on a copper cavity, which has lower material cost with higher availability and more importantly higher thermal conductivity. The coating of superconducting cavities currently is synthesized by physical vapour deposition (PVD) method which suffers from lack of conformity. By using chemical vapour deposition (CVD) and plasma enhanced chemical vapour deposition (PECVD) it is possible to deposit thin Nb layers uniformly with density very close to bulk material. This project explores the use of PECVD / CVD techniques to deposit metallic niobium on copper using NbCl5 as precursor and hydrogen as a coreagent. The samples obtained were then characterized via SEM, TEM, SAD, XRD, XPS, and EDX as well as assessing their superconductivity characteristics (RRR and Tc) All the samples deposited are superconductive and polycrystalline; the sample obtained with CVD measured RRR=31 and Tc=7.9 K, while the sample obtained with PECVD exhibited RRR=9 and Tc= 9.4 K. In both cases the films grew in a (100) preferred orientation.

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2015-WEPHA058

Export •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

WEPHA059

Physical Vapour Deposition of Thin Films for Use in Superconducting RF Cavities

3249

S. Wilde, B. Chesca
Loughborough University, Loughborough, Leicestershire, United Kingdom
A.N. Hannah, D.O. Malyshev, O.B. Malyshev, S.M. Pattalwar, R. Valizadeh
STFC/DL/ASTeC, Daresbury, Warrington, Cheshire, United Kingdom
G.B.G. Stenning
STFC/RAL/ISIS, Chilton, Didcot, Oxon, United Kingdom

The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. Optimizing superconducting properties of Nb thin-films is therefore essential. Nb films were deposited by magnetron sputtering in pulsed DC mode onto Si (100) and MgO (100) substrates and also by high impulse magnetron sputtering (HiPIMS) onto Si (100), MgO (100) and polycrystalline Cu. The films were characterised using scanning electron microscopy, x-ray diffraction and DC SQUID magnetometry.

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2015-WEPHA059

Export •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)