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TY - CONF AU - Pizzol, P. AU - Chalker, P. AU - Hannah, A.N. AU - Heil, T. AU - Malyshev, O.B. AU - Pattalwar, S.M. AU - Stenning, G.B.G. AU - Valizadeh, R. ED - Henderson, Stuart ED - Akers, Evelyn ED - Satogata, Todd ED - Schaa, Volker R.W. TI - Superconducting Coatings Synthesized by CVD/PECVD for SRF Cavities J2 - Proc. of IPAC2015, Richmond, VA, USA, May 3-8, 2015 C1 - Richmond, VA, USA T2 - International Particle Accelerator Conference T3 - 6 LA - english AB - Bulk niobium cavities are widely employed in particle accelerators to create high accelerating gradient despite their high material and operation cost. In order to reduce this cost, thin layer of niobium are deposited on a copper cavity, which has lower material cost with higher availability and more importantly higher thermal conductivity. The coating of superconducting cavities currently is synthesized by physical vapour deposition (PVD) method which suffers from lack of conformity. By using chemical vapour deposition (CVD) and plasma enhanced chemical vapour deposition (PECVD) it is possible to deposit thin Nb layers uniformly with density very close to bulk material. This project explores the use of PECVD / CVD techniques to deposit metallic niobium on copper using NbCl5 as precursor and hydrogen as a coreagent. The samples obtained were then characterized via SEM, TEM, SAD, XRD, XPS, and EDX as well as assessing their superconductivity characteristics (RRR and Tc) All the samples deposited are superconductive and polycrystalline; the sample obtained with CVD measured RRR=31 and Tc=7.9 K, while the sample obtained with PECVD exhibited RRR=9 and Tc= 9.4 K. In both cases the films grew in a (100) preferred orientation. PB - JACoW CP - Geneva, Switzerland SP - 3246 EP - 3248 KW - niobium KW - superconductivity KW - SRF KW - plasma KW - accelerating-gradient DA - 2015/06 PY - 2015 SN - 978-3-95450-168-7 DO - 10.18429/JACoW-IPAC2015-WEPHA058 UR - http://jacow.org/ipac2015/papers/wepha058.pdf ER -