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https://doi.org/10.18429/JACoW-IPAC2015-WEPMN028
Title Preliminary Mechanical Design of Ceramic Pipe Film Coating Equipment at Hefei Light Source II
Authors
  • J. Lu
    NPU, Xi'an Shaanxi, People's Republic of China
  • L. Fan, Y.Z. Hong, X.T. Pei, J. Wangpresenter, Y. Wang, W. Wei, Y.H. Xu, B. Zhang
    USTC/NSRL, Hefei, Anhui, People's Republic of China
Abstract Ceramic vacuum chambers are important components of the injection chamber at Hefei Light Source II (HLS II). The length of each Ceramic vacuum chamber is 350 mm and their inner surface is coated with TiN thin film whose properties are low secondary electron yield (SEY), good electrical conductivity, stability of performance, ability to block hydrogen permeation. Considering that the cross section of Ceramic pipe is racetrack structure, Ti plate was chose as the cathode to improve TiN thin film deposition rate. Meanwhile, the authors designed a motor drive magnetron sputtering film coating equipment to obtain uniform TiN film.
Paper download WEPMN028.PDF [0.782 MB / 3 pages]
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Conference IPAC2015, Richmond, VA, USA
Series International Particle Accelerator Conference (6th)
Proceedings Link to full IPAC2015 Proccedings
Session Wednesday Posters (Monroe)
Date 06-May-15   16:00–18:00
Main Classification 7: Accelerator Technology
Sub Classification T14 - Vacuum Technology
Keywords cathode, vacuum, injection, simulation, experiment
Publisher JACoW, Geneva, Switzerland
Editors Stuart Henderson (ANL, Argonne, IL, USA); Evelyn Akers (Jlab, Newport News, VA, USA); Todd Satogata (JLab, Newport News, VA, USA); Volker R.W. Schaa (GSI, Darmstadt, Germany)
ISBN 978-3-95450-168-7
Published June 2015
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