| Title |
IMALION – Creation and Low Energy Transportation of a Milliampere Metal Ion Beam |
| Authors |
- A. Silze, M. Kreller, G.H. Zschornack
DREEBIT GmbH, Dresden, Germany
- U. Hartung, T. Kopte, T. Weichselpresenter
Fraunhofer FEP, Dresden, Germany
|
| Abstract |
IMALION – which stands for IMplantation of ALuminum IONs – is a facility originally designed for applications in photovoltaics and other branches in semiconductor industry. The idea was to create and guide a milliampere beam of low charged metal ions so that targets with a width of 20 cm and more can be irradiated homogeneously with minimal differences in intensity and entrance angle of the incoming beam over the entire surface. In this poster, we outline the solutions which had to be found during the realization of the project. This concerns the production of a milliampere metal ion current in a newly designed electron cyclotron resonance (ECR) ion source combined with an internal sputter magnetron device. Stable operation of the sputter magnetron under ECR magnetic mirror conditions has been proven by optical spectroscopy and Langmuir probe measurements. Furthermore, electrostatic and magnetic beamline elements developed for precision guiding of a low energy but high intensity beam as well as high intensity ion beam diagnostics are presented and ion beam transportation simulations are shown.
|
| Funding |
This work is supported by the European Regional Development Fund (ERDF) and the Freistaat Sachsen (project no. 100074113 and 100074115). |
| Paper |
download MOPRI085.PDF [2.739 MB / 3 pages] |
| Export |
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※ EndNote |
| Conference |
IPAC2014, Dresden, Germany |
| Series |
International Particle Accelerator Conference (5th) |
| Proceedings |
Link to full IPAC2014 Proccedings |
| Session |
Poster Session, Ribery Area |
| Date |
16-Jun-14 16:00–18:00 |
| Main Classification |
04 Hadron Accelerators |
| Sub Classification |
T01 Proton and Ion Sources |
| Keywords |
ion, ion-source, ECR, simulation, plasma |
| Publisher |
JACoW Publishing, Geneva, Switzerland |
| Editors |
Christine Petit-Jean-Genaz (CERN, Geneva, Switzerland); Gianluigi Arduini (CERN, Geneva, Switzerland); Peter Michel (HZDR, Dresden, Germany); Volker RW Schaa (GSI, Darmstadt, Germany) |
| ISBN |
978-3-95450-132-8 |
| Published |
July 2014 |
| Copyright |
|
