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TY - CONF AU - Silze, A. AU - Hartung, U. AU - Kopte, T. AU - Kreller, M. AU - Weichsel, T. AU - Zschornack, G.H. ED - Petit-Jean-Genaz, Christine ED - Arduini, Gianluigi ED - Michel, Peter ED - Schaa, Volker RW TI - IMALION – Creation and Low Energy Transportation of a Milliampere Metal Ion Beam J2 - Proc. of IPAC2014, Dresden, Germany, June 15-20, 2014 C1 - Dresden, Germany T2 - International Particle Accelerator Conference T3 - 5 LA - english AB - IMALION – which stands for IMplantation of ALuminum IONs – is a facility originally designed for applications in photovoltaics and other branches in semiconductor industry. The idea was to create and guide a milliampere beam of low charged metal ions so that targets with a width of 20 cm and more can be irradiated homogeneously with minimal differences in intensity and entrance angle of the incoming beam over the entire surface. In this poster, we outline the solutions which had to be found during the realization of the project. This concerns the production of a milliampere metal ion current in a newly designed electron cyclotron resonance (ECR) ion source combined with an internal sputter magnetron device. Stable operation of the sputter magnetron under ECR magnetic mirror conditions has been proven by optical spectroscopy and Langmuir probe measurements. Furthermore, electrostatic and magnetic beamline elements developed for precision guiding of a low energy but high intensity beam as well as high intensity ion beam diagnostics are presented and ion beam transportation simulations are shown. PB - JACoW CP - Geneva, Switzerland SP - 809 EP - 811 KW - ion KW - ion-source KW - ECR KW - simulation KW - plasma DA - 2014/07 PY - 2014 SN - 978-3-95450-132-8 DO - 10.18429/JACoW-IPAC2014-MOPRI085 UR - http://jacow.org/ipac2014/papers/mopri085.pdf ER -