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Shevchenko, O.A.

Paper Title Page
MOPB33 The SASE FEL Two-Time Correlation Function 103
 
  • O.A. Shevchenko, N. Vinokurov
    BINP SB RAS, Novosibirsk
 
 

The new approach for the SASE radiation properties calculation was proposed recently. It is based on the use of BBGKY chain of equations, adapted for FEL. In fact, it is the only known logically correct way to describe the SASE phenomenon. The two-time correlation function is necessary for calculation of averaged SASE spectrum. The solution of the correlation function equation for linear stage of SASE process is obtained.

 
TUPA28 13.5-nm Free-Electron Laser for EUV Lithography 250
 
  • Y. Socol
    Falcon Analytics, Netanya
  • G.N. Kulipanov, O.A. Shevchenko, N. Vinokurov
    BINP SB RAS, Novosibirsk
  • A.N. Matveenko
    HZB, Berlin
 
 

Lithography over the last years has been actively used to produce more compact and powerful computers. The dimensions of the microchips still require shorter wavelengths of light to enhance future ‘nano’ scale production. It is envisaged that 193 nm lithography is beginning to reach its limit. Extreme Ultraviolet (EUV) lithography of 13.5 nm wavelength could provide a solution for the next step of miniaturization, however presently no light source exists with sufficient average power. We report here results of a study, showing the feasibility of a FEL EUV source driven by a multi-turn superconducting energy-recovery linac (ERL). The proposed 40x20 m2 facility will be located underground for radiation safety purposes. With MW-scale consumption from the power grid it is estimated to provide 5 kW of average EUV power. We elaborate in some detail the SASE option, which is presently technically feasible, however regenerative-amplifier option should be also kept in mind. The proposed design is based on a short-period (2-3 cm) undulator. The corresponding electron beam energy is about 0.6-0.8 GeV. The proposed accelerator consists of photoinjector, booster, and a multi-turn ERL.

 
THOC3 Variable-period Permanent Magnet Undulators 696
 
  • N. Vinokurov, O.A. Shevchenko, V.G. Tcheskidov
    BINP SB RAS, Novosibirsk
 
 

To change the wavelength of undulator radiation people frequently use the variation of undulator magnetic field amplitude. Another option is to change the undulator period. The scheme for such undulator is described. It provides possibility to change both period and number of periods. For the set of undulator sections (like in x-ray FELs) mechanical motion of periods eliminates the necessity of phase shifters between the undulator sections. Magnetic field calculations for some interesting undulator parameters were performed. Numerous advantages of new undulators (fixed gap, strong dependence of undulator radiation wavelength on period, relatively low field amplitude variation and variable number of periods) look very attractive. Prospects for this new type of undulators are discussed.

 

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