ERL2015 - List of Authors (Miyajima, T.)

Paper

Title

Page

Design Work of the ERL-FEL as the High Intense EUV Light Source

4

N. Nakamura, S. Chen, T. Furuya, K. Haga, I. Hanyu, K. Harada, T. Honda, Y. Honda, E. Kako, Y. Kamiya, R. Kato, H. Kawata, Y. Kobayashi, T. Konomi, T. Kubo, S. Michizono, T. Miyajima, H. Nakai, T. Obina, K. Oide, H. Sakai, S. Sakanaka, M. Shimada, K. Tsuchiya, K. Umemori, M. Yamamoto
KEK, Ibaraki, Japan
R. Hajima, N. Nishimori
JAEA, Ibaraki-ken, Japan

Energy recovery linac(ERL)-based free electron lasers(FELs) are promising candidates for high-power EUV sources. They can recover most acceleration energy from the electron beams and greatly reduce the dumped beam power and activation compared with those based on ordinary linear accelerators. We have investigated a feasible design of a 10-kW class ERL-FEL operated at 13.5 nm for EUV lithography applications. In this talk, we will present the design work of the ERL-FEL as the high-power EUV source.

Slides MOPCTH010 [4.589 MB]

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TUIBLH1020

Operational Experience of DC Photoemission Gun at the Compact ERL

N. Nishimori
JAEA/FEL, Ibaraki-ken, Japan
R. Hajima, R. Nagai
JAEA, Ibaraki-ken, Japan
Y. Honda, X.J. Jin, T. Miyajima, T. Obina, T. Uchiyama, M. Yamamoto
KEK, Ibaraki, Japan
M. Kuriki
HU/AdSM, Higashi-Hiroshima, Japan

Beam commissioning of the compact ERL (cERL) has been performed since Apr. 2013 for the next generation ERL light source project (PEARL), and x-ray generation via laser Compton scattering was demonstrated recently. We will present two years operational experience and future upgrade plan of the DC photoemission gun at the cERL.

Slides TUIBLH1020 [10.603 MB]

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TUIBLH1021

Development of a 500 kV DC Gun with Narrow Gap

M. Yamamoto, Y. Honda, X.J. Jin, M. Kobayashi, T. Miyajima, T. Uchiyama
KEK, Ibaraki, Japan
R. Hajima, R. Nagai, N. Nishimori
JAEA, Ibaraki-ken, Japan
M. Kuriki
Hiroshima University, Graduate School of Science, Higashi-Hiroshima, Japan
H. Kurisu
Yamaguchi University, Ube-Shi, Japan

The second 500 kV DC gun with 70 mm anode-cathode gap has been constructed at KEK. In 2014, a high voltage conditioning up to 550 kV was carried out and a 500 kV test has been done more than 50 hours intermittently without any trips. The vacuum of the gun is achieved 6x10^-10 Pa during a 500 kV test by pumping NEGs and a bakable cryopump. A beam test has been started from the end of March 2015.

Slides TUIBLH1021 [2.466 MB]

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Paper	Title	Page
MOPCTH010	Design Work of the ERL-FEL as the High Intense EUV Light Source	4
	N. Nakamura, S. Chen, T. Furuya, K. Haga, I. Hanyu, K. Harada, T. Honda, Y. Honda, E. Kako, Y. Kamiya, R. Kato, H. Kawata, Y. Kobayashi, T. Konomi, T. Kubo, S. Michizono, T. Miyajima, H. Nakai, T. Obina, K. Oide, H. Sakai, S. Sakanaka, M. Shimada, K. Tsuchiya, K. Umemori, M. Yamamoto KEK, Ibaraki, Japan R. Hajima, N. Nishimori JAEA, Ibaraki-ken, Japan
	Energy recovery linac(ERL)-based free electron lasers(FELs) are promising candidates for high-power EUV sources. They can recover most acceleration energy from the electron beams and greatly reduce the dumped beam power and activation compared with those based on ordinary linear accelerators. We have investigated a feasible design of a 10-kW class ERL-FEL operated at 13.5 nm for EUV lithography applications. In this talk, we will present the design work of the ERL-FEL as the high-power EUV source.
	Slides MOPCTH010 [4.589 MB]
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

TUIBLH1020	Operational Experience of DC Photoemission Gun at the Compact ERL
	N. Nishimori JAEA/FEL, Ibaraki-ken, Japan R. Hajima, R. Nagai JAEA, Ibaraki-ken, Japan Y. Honda, X.J. Jin, T. Miyajima, T. Obina, T. Uchiyama, M. Yamamoto KEK, Ibaraki, Japan M. Kuriki HU/AdSM, Higashi-Hiroshima, Japan
	Beam commissioning of the compact ERL (cERL) has been performed since Apr. 2013 for the next generation ERL light source project (PEARL), and x-ray generation via laser Compton scattering was demonstrated recently. We will present two years operational experience and future upgrade plan of the DC photoemission gun at the cERL.
	Slides TUIBLH1020 [10.603 MB]
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

TUIBLH1021	Development of a 500 kV DC Gun with Narrow Gap
	M. Yamamoto, Y. Honda, X.J. Jin, M. Kobayashi, T. Miyajima, T. Uchiyama KEK, Ibaraki, Japan R. Hajima, R. Nagai, N. Nishimori JAEA, Ibaraki-ken, Japan M. Kuriki Hiroshima University, Graduate School of Science, Higashi-Hiroshima, Japan H. Kurisu Yamaguchi University, Ube-Shi, Japan
	The second 500 kV DC gun with 70 mm anode-cathode gap has been constructed at KEK. In 2014, a high voltage conditioning up to 550 kV was carried out and a 500 kV test has been done more than 50 hours intermittently without any trips. The vacuum of the gun is achieved 6x10^-10 Pa during a 500 kV test by pumping NEGs and a bakable cryopump. A beam test has been started from the end of March 2015.
	Slides TUIBLH1021 [2.466 MB]
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)