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RIS citation export for MOPCTH010: Design Work of the ERL-FEL as the High Intense EUV Light Source

TY - CONF
AU - Nakamura, N.
AU - Chen, S.
AU - Furuya, T.
AU - Haga, K.
AU - Hajima, R.
AU - Hanyu, I.
AU - Harada, K.
AU - Honda, T.
AU - Honda, Y.
AU - Kako, E.
AU - Kamiya, Y.
AU - Kato, R.
AU - Kawata, H.
AU - Kobayashi, Y.
AU - Konomi, T.
AU - Kubo, T.
AU - Michizono, S.
AU - Miyajima, T.
AU - Nakai, H.
AU - Nishimori, N.
AU - Obina, T.
AU - Oide, K.
AU - Sakai, H.
AU - Sakanaka, S.
AU - Shimada, M.
AU - Tsuchiya, K.
AU - Umemori, K.
AU - Yamamoto, M.
ED - Belomestnykh, Sergey
ED - Hoffman, Caitlin M.
ED - Schaa, Volker RW
TI - Design Work of the ERL-FEL as the High Intense EUV Light Source
J2 - Proc. of ERL2015, Stony Brook, NY, USA, June 7-12, 2015
C1 - Stony Brook, NY, USA
T2 - ICFA Advanced Beam Dynamics Workshop on Energy Recovery Linacs
T3 - 56
LA - english
AB - Energy recovery linac(ERL)-based free electron lasers(FELs) are promising candidates for high-power EUV sources. They can recover most acceleration energy from the electron beams and greatly reduce the dumped beam power and activation compared with those based on ordinary linear accelerators. We have investigated a feasible design of a 10-kW class ERL-FEL operated at 13.5 nm for EUV lithography applications. In this talk, we will present the design work of the ERL-FEL as the high-power EUV source.
PB - JACoW
CP - Geneva, Switzerland
SP - 4
EP - 9
KW - FEL
KW - optics
KW - linac
KW - emittance
KW - simulation
DA - 2015/09
PY - 2015
SN - 978-3-95450-183-0
DO - 10.18429/JACoW-ERL2015-MOPCTH010
UR - http://jacow.org/ERL2015/papers/mopcth010.pdf
ER -