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TY - CONF AU - Nakamura, N. AU - Chen, S. AU - Furuya, T. AU - Haga, K. AU - Hajima, R. AU - Hanyu, I. AU - Harada, K. AU - Honda, T. AU - Honda, Y. AU - Kako, E. AU - Kamiya, Y. AU - Kato, R. AU - Kawata, H. AU - Kobayashi, Y. AU - Konomi, T. AU - Kubo, T. AU - Michizono, S. AU - Miyajima, T. AU - Nakai, H. AU - Nishimori, N. AU - Obina, T. AU - Oide, K. AU - Sakai, H. AU - Sakanaka, S. AU - Shimada, M. AU - Tsuchiya, K. AU - Umemori, K. AU - Yamamoto, M. ED - Belomestnykh, Sergey ED - Hoffman, Caitlin M. ED - Schaa, Volker RW TI - Design Work of the ERL-FEL as the High Intense EUV Light Source J2 - Proc. of ERL2015, Stony Brook, NY, USA, June 7-12, 2015 C1 - Stony Brook, NY, USA T2 - ICFA Advanced Beam Dynamics Workshop on Energy Recovery Linacs T3 - 56 LA - english AB - Energy recovery linac(ERL)-based free electron lasers(FELs) are promising candidates for high-power EUV sources. They can recover most acceleration energy from the electron beams and greatly reduce the dumped beam power and activation compared with those based on ordinary linear accelerators. We have investigated a feasible design of a 10-kW class ERL-FEL operated at 13.5 nm for EUV lithography applications. In this talk, we will present the design work of the ERL-FEL as the high-power EUV source. PB - JACoW CP - Geneva, Switzerland SP - 4 EP - 9 KW - FEL KW - optics KW - linac KW - emittance KW - simulation DA - 2015/09 PY - 2015 SN - 978-3-95450-183-0 DO - 10.18429/JACoW-ERL2015-MOPCTH010 UR - http://jacow.org/ERL2015/papers/mopcth010.pdf ER -