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TUOBMH02 |
Millimeter Wave Microwave Sources for Electron Cyclotron Resonance Ion Sources |
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- G.G. Denisov, Yu.V. Bykov, A.G. Eremeev, I.G. Gachev, M.Yu. Glyavin, V.V. Holoptsev, S.V. Samsonov, E.M. Tai
IAP/RAS, Nizhny Novgorod, Russia
- E.A. Soluyanova
GYCOM Ltd, Nizhny Novgorod, Russia
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Two kinds of microwave sources (gyro-type devices) applicable for use in ECR ion sources are described: microwave oscillators and amplifiers. Gyrotron oscillators are capable to provide very high power (up to 1MW in CW regime) at any frequency in the millimeter wavelength range. Gyrotrons sources of moderate power are already used in several ion source setups where requested frequency and power are 24 GHz; 28 GHz and 10-15 kW/CW correspondingly. Usually gyrotron oscillator operates at one definite frequency. For special request a gyrotron can be designed for operation at two (three) frequencies or with some frequency tuning. Some pulse power gyrotrons (e.g.60 GHz/300kW) are also now under study to be applied in ion sources. Gyro-amplifiers have an instant frequency band of an amplified signal. Recent result on this activity at IAP includes realization of a CW Ka-band gyro-TWT. The best performance of this tube was obtained using an electron beam with voltage of (20+20 kV) and current of 1.4 A. In the regime of maximum instantaneous bandwidth it delivers output power within a frequency interval of 2 GHz in Ka-band with a maximum power of 7 kW. One more setup includes a Ka-band pulsed amplifier with a peak power of up to 150 kW and bandwidth of about 10% capable for operation with 10% duty factor. The gyro-TWTs are based on DC oil-cooled solenoids and single-stage depressed collectors.
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Slides TUOBMH02 [5.075 MB]
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| THOMMH03 |
A Point-like Source of Extreme Ultraviolet Radiation Based on Non-equilibrium Discharge, Sustained by Powerful Radiation of Terahertz Gyrotron |
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- V. Sidorov, M.Yu. Glyavin, S. Golubev, I. Izotov, A.G. Litvak, G. Luchinin, D. Mansfeld, S. Razin, V. Skalyga, A. Vodopyanov
IAP/RAS, Nizhny Novgorod, Russia
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Funding: The work was supported by RSF within grant No 14-12-00609.
It is proposed in this paper to use discharge plasma supported by terahertz radiation as a source of EUV light for high-resolution lithography. In this report we discuss the experimental investigation of two types of EUV sources based on discharge, supported by powerful gyrotron radiation. Following investigation results are described: -a series of experiments that demonstrate the generation of EUV light from the vacuum-arc discharge plasma in tin vapor in the magnetic trap heated by gyrotron radiation with a frequency of 75 GHz under electron cyclotron resonance (ECR) conditions; -a numerical modeling of the plasma emissivity in the EUV range, depending on the parameters of the heating radiation is performed; -experimental studies of EUV emission from plasma discharge sustained by strong terahertz powerful radiation in inhomogeneous gas flows are started.
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Slides THOMMH03 [1.249 MB]
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