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Text/Word citation export for WEPTEV012: Characterization of Atomic-Layer-Deposited NbTiN and NbTiN/AlN Films for SIS Multilayer Structures

Z. Sun, X. Deng, M. Liepe, and T.E. Oseroff, “Characterization of Atomic-Layer-Deposited NbTiN and NbTiN/AlN Films for SIS Multilayer Structures”, in Proc. SRF'21, East Lansing, MI, USA, Jun.-Jul. 2021, pp. 662-665. doi:10.18429/JACoW-SRF2021-WEPTEV012