JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Giaccone, B. AU - Martinello, M. AU - Zasadzinski, J. ED - Saito, Kenji ED - Xu, Ting ED - Sakamoto, Naruhiko ED - Lesage, Ana ED - Schaa, Volker R.W. TI - Study of the Niobium Oxide Structure and Microscopic Effect of Plasma Processing on the Niobium Surface J2 - Proc. of SRF2021, East Lansing, MI, USA, 28 June-02 July 2021 CY - East Lansing, MI, USA T2 - International Conference on RF Superconductivity T3 - 20 LA - english AB - A study of the niobium oxide structure is presented here, with particular focus on the niobium suboxides. Multiple steps of argon sputtering and XPS measurements were carried out until the metal surface was exposed. The sample was then exposed to air and the oxide regrowth was studied. In addition, three Nb samples prepared with different surface treatments were studied before and after being subjected to plasma processing. The scope is investigating the microscopic effect that the reactive oxygen contained in the glow discharge may have on the niobium surface. This study suggests that the Nb₂O₅ thickness may increase, although no negative change in the cavity performance is measured since the pentoxide is a dielectric. PB - JACoW Publishing CP - Geneva, Switzerland SP - 585 EP - 589 KW - plasma KW - niobium KW - cavity KW - background KW - ECR DA - 2022/10 PY - 2022 SN - 2673-5504 SN - 978-3-95450-233-2 DO - doi:10.18429/JACoW-SRF2021-WEPCAV001 UR - https://jacow.org/srf2021/papers/wepcav001.pdf ER -