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RIS citation export for TUPFDV002: SIMS Sample Holder and Grain Orientation Effects

TY  - CONF
AU  - Angle, J.W.
AU  - Kelley, M.J.
AU  - Lechner, E.M.
AU  - Palczewski, A.D.
AU  - Reece, C.E.
AU  - Stevie, F.A.
ED  - Saito, Kenji
ED  - Xu, Ting
ED  - Sakamoto, Naruhiko
ED  - Lesage, Ana
ED  - Schaa, Volker R.W.
TI  - SIMS Sample Holder and Grain Orientation Effects
J2  - Proc. of SRF2021, East Lansing, MI, USA, 28 June-02 July 2021
CY  - East Lansing, MI, USA
T2  - International Conference on RF Superconductivity
T3  - 20
LA  - english
AB  - SIMS analyses for ’N-doped’ materials are becoming increasingly important. A major hurdle to acquiring quantitative SIMS results for these materials is the uncertainty of instrument calibration due to changes in sample height either from sample topography or from the sample holder itself. The CAMECA sample holder design allows for many types of samples to be analyzed. However, the cost is that the holder faceplate can bend, introducing uncertainty into the SIMS results. Here we designed and created an improved sample holder which is reinforced to prevent faceplate deflection and thereby reduce uncertainty. Simulations show that the new design significantly reduces deflection from 10 µm to 5 nm. Measurements show a reduction of calibration (RSF) uncertainty from this source from 4.1% to 0.95%. Grain orientation has long been suspected to affect RSF determination as well. A bicrystal implant standard consisting of [111] and [001] grains were repeatedly rotated 15° in between analyses. It was observed that 20% of the analyses performed on [111] grains exhibited anomalously high RSF values likely due to the changing of the grain normal with respect to the primary Cs+ beam.
PB  - JACoW Publishing
CP  - Geneva, Switzerland
SP  - 401
EP  - 405
KW  - niobium
KW  - SRF
KW  - experiment
KW  - cavity
KW  - simulation
DA  - 2022/10
PY  - 2022
SN  - 2673-5504
SN  - 978-3-95450-233-2
DO  - doi:10.18429/JACoW-SRF2021-TUPFDV002
UR  - https://jacow.org/srf2021/papers/tupfdv002.pdf
ER  -