JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
@inproceedings{angle:srf2021-tupfdv002,
author = {J.W. Angle and M.J. Kelley and E.M. Lechner and A.D. Palczewski and C.E. Reece and F.A. Stevie},
title = {{SIMS Sample Holder and Grain Orientation Effects}},
booktitle = {Proc. SRF'21},
% booktitle = {Proc. 20th International Conference on RF Superconductivity (SRF'21)},
pages = {401--405},
eid = {TUPFDV002},
language = {english},
keywords = {niobium, SRF, experiment, cavity, simulation},
venue = {East Lansing, MI, USA},
series = {International Conference on RF Superconductivity},
number = {20},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {10},
year = {2022},
issn = {2673-5504},
isbn = {978-3-95450-233-2},
doi = {10.18429/JACoW-SRF2021-TUPFDV002},
url = {https://jacow.org/srf2021/papers/tupfdv002.pdf},
abstract = {{SIMS analyses for ’N-doped’ materials are becoming increasingly important. A major hurdle to acquiring quantitative SIMS results for these materials is the uncertainty of instrument calibration due to changes in sample height either from sample topography or from the sample holder itself. The CAMECA sample holder design allows for many types of samples to be analyzed. However, the cost is that the holder faceplate can bend, introducing uncertainty into the SIMS results. Here we designed and created an improved sample holder which is reinforced to prevent faceplate deflection and thereby reduce uncertainty. Simulations show that the new design significantly reduces deflection from 10 µm to 5 nm. Measurements show a reduction of calibration (RSF) uncertainty from this source from 4.1% to 0.95%. Grain orientation has long been suspected to affect RSF determination as well. A bicrystal implant standard consisting of [111] and [001] grains were repeatedly rotated 15° in between analyses. It was observed that 20% of the analyses performed on [111] grains exhibited anomalously high RSF values likely due to the changing of the grain normal with respect to the primary Cs+ beam.}},
}