JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Gaitan, G. AU - Bishop, P. AU - Holic, A.T. AU - Kulina, G. AU - Liepe, M. AU - Sears, J. AU - Sun, Z. ED - Saito, Kenji ED - Xu, Ting ED - Sakamoto, Naruhiko ED - Lesage, Ana ED - Schaa, Volker R.W. TI - Development of a System for Coating SRF Cavities Using Remote Plasma CVD J2 - Proc. of SRF2021, East Lansing, MI, USA, 28 June-02 July 2021 CY - East Lansing, MI, USA T2 - International Conference on RF Superconductivity T3 - 20 LA - english AB - Next-generation, thin-film surfaces employing Nb₃Sn, NbN, NbTiN, and other compound superconductors are destined to allow reaching superior RF performance levels in SRF cavities. Optimized, advanced deposition processes are required to enable high-quality films of such materials on large and complex-shaped cavities. For this purpose, Cornell University is developing a remote plasma-enhanced chemical vapor deposition (CVD) system that facilitates coating on complicated geometries with a high deposition rate. This system is based on a high-temperature tube furnace with a clean vacuum and furnace loading system. The use of plasma alongside reacting precursors will significantly reduce the required processing temperature and promote precursor decomposition. A vacuum quality monitor (VQM) is used to characterize the residual gases before coating. The CVD system has been designed and is currently under assembly and commissioning. PB - JACoW Publishing CP - Geneva, Switzerland SP - 129 EP - 132 KW - cavity KW - plasma KW - SRF KW - vacuum KW - controls DA - 2022/10 PY - 2022 SN - 2673-5504 SN - 978-3-95450-233-2 DO - doi:10.18429/JACoW-SRF2021-SUPTEV007 UR - https://jacow.org/srf2021/papers/suptev007.pdf ER -