JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
@inproceedings{gaitan:srf2021-suptev007,
author = {G. Gaitan and P. Bishop and A.T. Holic and G. Kulina and M. Liepe and J. Sears and Z. Sun},
% author = {G. Gaitan and P. Bishop and A.T. Holic and G. Kulina and M. Liepe and J. Sears and others},
% author = {G. Gaitan and others},
title = {{Development of a System for Coating SRF Cavities Using Remote Plasma CVD}},
booktitle = {Proc. SRF'21},
% booktitle = {Proc. 20th International Conference on RF Superconductivity (SRF'21)},
pages = {129--132},
eid = {SUPTEV007},
language = {english},
keywords = {cavity, plasma, SRF, vacuum, controls},
venue = {East Lansing, MI, USA},
series = {International Conference on RF Superconductivity},
number = {20},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {10},
year = {2022},
issn = {2673-5504},
isbn = {978-3-95450-233-2},
doi = {10.18429/JACoW-SRF2021-SUPTEV007},
url = {https://jacow.org/srf2021/papers/suptev007.pdf},
abstract = {{Next-generation, thin-film surfaces employing Nb₃Sn, NbN, NbTiN, and other compound superconductors are destined to allow reaching superior RF performance levels in SRF cavities. Optimized, advanced deposition processes are required to enable high-quality films of such materials on large and complex-shaped cavities. For this purpose, Cornell University is developing a remote plasma-enhanced chemical vapor deposition (CVD) system that facilitates coating on complicated geometries with a high deposition rate. This system is based on a high-temperature tube furnace with a clean vacuum and furnace loading system. The use of plasma alongside reacting precursors will significantly reduce the required processing temperature and promote precursor decomposition. A vacuum quality monitor (VQM) is used to characterize the residual gases before coating. The CVD system has been designed and is currently under assembly and commissioning.}},
}