JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
@inproceedings{gaitan:srf2021-suptev007, author = {G. Gaitan and P. Bishop and A.T. Holic and G. Kulina and M. Liepe and J. Sears and Z. Sun}, % author = {G. Gaitan and P. Bishop and A.T. Holic and G. Kulina and M. Liepe and J. Sears and others}, % author = {G. Gaitan and others}, title = {{Development of a System for Coating SRF Cavities Using Remote Plasma CVD}}, booktitle = {Proc. SRF'21}, % booktitle = {Proc. 20th International Conference on RF Superconductivity (SRF'21)}, pages = {129--132}, eid = {SUPTEV007}, language = {english}, keywords = {cavity, plasma, SRF, vacuum, controls}, venue = {East Lansing, MI, USA}, series = {International Conference on RF Superconductivity}, number = {20}, publisher = {JACoW Publishing, Geneva, Switzerland}, month = {10}, year = {2022}, issn = {2673-5504}, isbn = {978-3-95450-233-2}, doi = {10.18429/JACoW-SRF2021-SUPTEV007}, url = {https://jacow.org/srf2021/papers/suptev007.pdf}, abstract = {{Next-generation, thin-film surfaces employing Nb₃Sn, NbN, NbTiN, and other compound superconductors are destined to allow reaching superior RF performance levels in SRF cavities. Optimized, advanced deposition processes are required to enable high-quality films of such materials on large and complex-shaped cavities. For this purpose, Cornell University is developing a remote plasma-enhanced chemical vapor deposition (CVD) system that facilitates coating on complicated geometries with a high deposition rate. This system is based on a high-temperature tube furnace with a clean vacuum and furnace loading system. The use of plasma alongside reacting precursors will significantly reduce the required processing temperature and promote precursor decomposition. A vacuum quality monitor (VQM) is used to characterize the residual gases before coating. The CVD system has been designed and is currently under assembly and commissioning.}}, }