JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Howard, K. AU - Liepe, M. AU - Sun, Z. ED - Saito, Kenji ED - Xu, Ting ED - Sakamoto, Naruhiko ED - Lesage, Ana ED - Schaa, Volker R.W. TI - Thermal Annealing of Sputtered Nb₃Sn and V₃Si Thin Films for Superconducting RF Cavities J2 - Proc. of SRF2021, East Lansing, MI, USA, 28 June-02 July 2021 CY - East Lansing, MI, USA T2 - International Conference on RF Superconductivity T3 - 20 LA - english AB - Nb₃Sn and V₃Si thin films are alternative material candidates for the next-generation of superconducting radio frequency (SRF) cavities. However, past sputtered films suffer from stoichiometry and strain issues during deposition and post annealing. As such, we aim to explore the structural and chemical effects of thermal annealing, both in-situ and post-sputtering, on DC-sputtered Nb₃Sn and V₃Si with varying thickness on Nb or Cu substrates. We successfully enabled recrystallization of 100 nm thin Nb₃Sn films with stoichiometric and strain-free grains at 950 C annealing. For 2 um films, we observed removal of strain and slight increase in grain size with increasing temperature. A phase transformation from unstable to stable structure appeared on thick V₃Si samples, while we observed significant Sn loss in thick Nb₃Sn films at high temperature anneals. For films on Cu substrates, we observed similar Sn and Si loss during annealing likely due to Cu-Sn and Cu-Si phase generation and subsequent Sn and Si evaporation. These results encourage us to refine our process to obtain high quality films for SRF use. PB - JACoW Publishing CP - Geneva, Switzerland SP - 82 EP - 85 KW - SRF KW - cavity KW - ECR KW - lattice KW - radio-frequency DA - 2022/10 PY - 2022 SN - 2673-5504 SN - 978-3-95450-233-2 DO - doi:10.18429/JACoW-SRF2021-SUPFDV009 UR - https://jacow.org/srf2021/papers/supfdv009.pdf ER -