JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Cavellier, M. ED - Saito, Kenji ED - Xu, Ting ED - Sakamoto, Naruhiko ED - Lesage, Ana ED - Schaa, Volker R.W. TI - A New Process for Nitrogen Doping of Niobium Cavities J2 - Proc. of SRF2021, East Lansing, MI, USA, 28 June-02 July 2021 CY - East Lansing, MI, USA T2 - International Conference on RF Superconductivity T3 - 20 LA - english AB - Nitrogen-doping of Niobium cavities is now well known and industrialization of this process is emerging. However, the current process, based on thermal treatment in Nitrogen atmosphere leads to various inaccuracies (what is the concentration of Nitrogen in the Nb material? Penetration depth, created phases, …) and some post-treatment like chemical-mechanical polishing of the inner surface. This work presents a new and more accurate patented process based on nitrogen ion beam implantation into the inner surface of Nb cavities. Ion implantation is a well-known, controlled, accurate and reproducible process that does not require post-treatment. For these reasons, the industrialization of Nitrogen-doping Nb cavities will be improved through ion implantation. PB - JACoW Publishing CP - Geneva, Switzerland SP - 276 EP - 277 KW - cavity KW - niobium KW - SRF KW - vacuum KW - superconductivity DA - 2022/10 PY - 2022 SN - 2673-5504 SN - 978-3-95450-233-2 DO - doi:10.18429/JACoW-SRF2021-MOPCAV009 UR - https://jacow.org/srf2021/papers/mopcav009.pdf ER -