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@inproceedings{ito:srf2021-frofdv01, author = {H. Ito and A. Araki and K. Takahashi and K. Umemori}, title = {{Systematic Investigation of Mid-T Furnace Baking for High-Q Performance}}, booktitle = {Proc. SRF'21}, % booktitle = {Proc. 20th International Conference on RF Superconductivity (SRF'21)}, pages = {881--884}, eid = {FROFDV01}, language = {english}, keywords = {cavity, niobium, vacuum, SRF, superconducting-RF}, venue = {East Lansing, MI, USA}, series = {International Conference on RF Superconductivity}, number = {20}, publisher = {JACoW Publishing, Geneva, Switzerland}, month = {10}, year = {2022}, issn = {2673-5504}, isbn = {978-3-95450-233-2}, doi = {10.18429/JACoW-SRF2021-FROFDV01}, url = {https://jacow.org/srf2021/papers/frofdv01.pdf}, abstract = {{We report on an investigation of the effect of a new baking process called "furnace baking" on the quality factor. Furnace baking is performed as the final step of the cavity surface treatment; the cavities are heated in a vacuum furnace in a temperature range of 200-800C for 3 h, followed by high-pressure rinsing and radio-frequency measurement. We find the anti-Q-slope for cavities furnace-baked at a temperature range of 250 to 400C and a reduction in the residual resistance for all cavities. In particular, an extremely high Q value of 5·10¹⁰ at 16 MV/m and 2.0 K is obtained for cavities furnace-baked at 300C.}}, }