The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - CONF AU - Ito, R. AU - Hayano, H. AU - Ito, H. AU - Iwashita, Y. AU - Katayama, R. AU - Kubo, T. AU - Nagata, T. AU - Saeki, T. ED - Michel, Peter ED - Arnold, André ED - Schaa, Volker RW TI - Nb₃Sn Thin Film Coating Method for Superconducting Multilayered Structure J2 - Proc. of SRF2019, Dresden, Germany, 30 June-05 July 2019 CY - Dresden, Germany T2 - International Conference on RF Superconductivity T3 - 19 LA - english AB - S-I-S (superconductor-insulator-superconductor) multilayered structure has been proposed in order to increase the maximum acceleration gradient of SRF cavities. Nb₃Sn is the material most expected as a superconducting layer of the S-I-S multilayered structure because it offers both a large critical temperature and large predicted Hsh. Most important in fabricating Nb₃Sn thin films is the stoichiometry of the material produced, and the lack of tin leads to performance degradation. We have launched a new in-house DC magnetron sputtering apparatus for Nb₃Sn deposition. Nb and Sn layers were alternately and repeatedly deposited on Si wafer while adjusting the film thickness of each layer, so we successfully obtained Nb-Sn films having appropriate composition ratio. The as-deposited films were annealed under the temperature of 600 degree C for 1 hour to generate the Nb₃Sn phase. The characteristics of Nb-Sn films evaluated by XRD, XRF, FE-SEM, and so on. We also measured critical temperature of the annealed films. In this paper, the detail of the Nb₃Sn coating method and the measurement result of the Nb-Sn films will be reported. PB - JACoW Publishing CP - Geneva, Switzerland SP - 628 EP - 631 KW - site KW - SRF KW - cavity KW - target KW - experiment DA - 2019/08 PY - 2019 SN - "" SN - 978-3-95450-211-0 DO - doi:10.18429/JACoW-SRF2019-TUP077 UR - http://jacow.org/srf2019/papers/tup077.pdf ER -