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RIS citation export for TUP075: New Progress for Nb Sputtered 325 MHz QWR Cavities in IMP

TY  - CONF
AU  - Pan, F.
AU  - Guo, H.
AU  - He, Y.
AU  - Jiang, T.C.
AU  - Li, C.L.
AU  - Lu, M.
AU  - Tan, T.
ED  - Michel, Peter
ED  - Arnold, André
ED  - Schaa, Volker RW
TI  - New Progress for Nb Sputtered 325 MHz QWR Cavities in IMP
J2  - Proc. of SRF2019, Dresden, Germany, 30 June-05 July 2019
CY  - Dresden, Germany
T2  - International Conference on RF Superconductivity
T3  - 19
LA  - english
AB  - Comparing with bulk niobium cavities, the Nb/Cu cavities feature a much better stability at 4.5 K. Last year, two 325 MHz QWR copper cavities coated with biased DC diode sputterred Nb for CiADS has been accomplished at IMP. But vertical tests showed the cavities had low Q₀ at 4 K. To solve the issue, a new coating system was designed and built. The sputtering target was redesigned and manufactured. The coating parameters were selected again and auxiliary heating was used to control the coating temperature in the process of sputtering. The power and Ar pressure during coating were also carefully selected. The paper covers resulting film characters, vertical tests with the evolution of the sputtering process, and improvements we made since last year.
PB  - JACoW Publishing
CP  - Geneva, Switzerland
SP  - 621
EP  - 623
KW  - cavity
KW  - target
KW  - experiment
KW  - SRF
KW  - niobium
DA  - 2019/08
PY  - 2019
SN  - ""
SN  - 978-3-95450-211-0
DO  - doi:10.18429/JACoW-SRF2019-TUP075
UR  - http://jacow.org/srf2019/papers/tup075.pdf
ER  -