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@InProceedings{Peshl:SRF2017-TUPB098,
author = {J.J. Peshl and S. Popović and J. Upadhyay and A-M. Valente-Feliciano and L. Vušković},
title = {{T}he {E}ffect of {P}rocess {P}arameters on the {S}urface {P}roperties of {N}iobium {D}uring {P}lasma {E}tching},
booktitle = {Proc. of International Conference on RF Superconductivity (SRF'17),
Lanzhou, China, July 17-21, 2017},
pages = {628--630},
paper = {TUPB098},
language = {english},
keywords = {ion, plasma, cavity, experiment, SRF},
venue = {Lanzhou, China},
series = {International Conference on RF Superconductivity},
number = {18},
publisher = {JACoW},
address = {Geneva, Switzerland},
month = {Jan.},
year = {2018},
isbn = {978-3-95450-191-5},
doi = {https://doi.org/10.18429/JACoW-SRF2017-TUPB098},
url = {http://jacow.org/srf2017/papers/tupb098.pdf},
note = {https://doi.org/10.18429/JACoW-SRF2017-TUPB098},
}