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RIS citation export for TUPB055: Nb3Sn Thin Film Deposition On Copper By DC Magnetron Sputtering

TY - CONF
AU - Tan, W.W.
AU - Li, B.T.
AU - Lu, X.Y.
AU - Xiao, L.
AU - Xie, D.
AU - Yang, D.Y.
AU - Yang, Y.
AU - Yang, Z.Q.
AU - Zhao, J.
ED - Schaa, Volker RW
ED - He, Yuan
ED - Li, Lu
ED - Zhao, Ning
TI - Nb3Sn Thin Film Deposition On Copper By DC Magnetron Sputtering
J2 - Proc. of SRF2017, Lanzhou, China, July 17-21, 2017
C1 - Lanzhou, China
T2 - International Conference on RF Superconductivity
T3 - 18
LA - english
AB - Nb3Sn for SRF cavities has been coated on copper samples by DC magnetron Sputtering. Pure Nb target and pure Sn target were installed separately in the magnetron sputtering device. Nb3Sn precursor was coated on copper in the Ar atmosphere of 0.5 Pa. The Nb3Sn precursor was annealed in the vacuum furnace whose pressure is 10⁻⁴ Pa. The XRD results demonstrate the exist of Nb3Sn crystal, and MPMS results show superconductivity of Nb3Sn. The highest critical temperature obtained is 15K.
PB - JACoW
CP - Geneva, Switzerland
SP - 512
EP - 515
KW - ion
KW - target
KW - SRF
KW - cavity
KW - niobium
DA - 2018/01
PY - 2018
SN - 978-3-95450-191-5
DO - 10.18429/JACoW-SRF2017-TUPB055
UR - http://jacow.org/srf2017/papers/tupb055.pdf
ER -