The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
%\cite{Kato:SRF2017-THPB055}
\bibitem{Kato:SRF2017-THPB055}
S. Kato, H. Hayano,
\textquotedblleft{Plasma-enhanced ALD System for SRF Cavity}\textquotedblright,
in \emph{Proc. SRF2017}, \url{https://doi.org/10.18429/JACoW-SRF2017-THPB055}, 2018.
% in \emph{Proc. SRF2017}, \url{https://doi.org/10.18429/JACoW-SRF2017-THPB055}, pp. 870--872.
% in \emph{Proc. SRF2017}, Lanzhou, China, July 2017, paper THPB055, \url{https://doi.org/10.18429/JACoW-SRF2017-THPB055}
% in \emph{Proc. 18th Int. Conf. on RF Superconductivity (SRF'17)},
% Lanzhou, China, July 2017, paper THPB055, pp. 870--872,
% ISBN: 978-3-95450-191-5,
% \url{http://jacow.org/srf2017/papers/thpb055.pdf},
% \url{https://doi.org/10.18429/JACoW-SRF2017-THPB055}, 2018.