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@InProceedings{Kato:SRF2017-THPB055,
author = {S. Kato and H. Hayano},
title = {{P}lasma{-}enhanced {ALD} {S}ystem for {SRF} {C}avity},
booktitle = {Proc. of International Conference on RF Superconductivity (SRF'17),
Lanzhou, China, July 17-21, 2017},
pages = {870--872},
paper = {THPB055},
language = {english},
keywords = {ion, cavity, niobium, plasma, SRF},
venue = {Lanzhou, China},
series = {International Conference on RF Superconductivity},
number = {18},
publisher = {JACoW},
address = {Geneva, Switzerland},
month = {Jan.},
year = {2018},
isbn = {978-3-95450-191-5},
doi = {https://doi.org/10.18429/JACoW-SRF2017-THPB055},
url = {http://jacow.org/srf2017/papers/thpb055.pdf},
note = {https://doi.org/10.18429/JACoW-SRF2017-THPB055},
}