The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - CONF AU - Awais, A. AU - Lunt, A.J.G. AU - Rosaz, G.J. AU - Sublet, A. AU - Taborelli, M. ED - Schaa, Volker RW ED - He, Yuan ED - Li, Lu ED - Zhao, Ning TI - Double Cathode Configuration for the Nb Coating of HIE-ISOLDE Cavities J2 - Proc. of SRF2017, Lanzhou, China, July 17-21, 2017 C1 - Lanzhou, China T2 - International Conference on RF Superconductivity T3 - 18 LA - english AB - The Quarter Wave Resonator (QWR) cavities for HIE-ISOLDE project at CERN have entered their ending phase of production. Some R&D is still required to improve the uniformity of the Nb layer thickness on the cavity surface. In order to improve this behaviour one approach which has been proposed is to replace the single cathode with a double cathode and test the suitability of different deposition techniques. With this change it is possible to control the plasma and power distribution separately for the inner and outer part of cavity and thereby potentially improve film uniformity throughout the cavity and coating duration. In this study a comparison between the deposition rates obtained using a single cathode and a double cathode using Direct Current (DC)-bias diode sputtering, DC-magnetron sputtering (DCMS) and Pulsed DC-magnetron sputtering (PDCMS) is presented. The morphology of the thin film samples were compared using Focused Ion Beam (FIB) cross section milling and Scanning Electron Microscopy (SEM) analysis. PB - JACoW CP - Geneva, Switzerland SP - 854 EP - 858 KW - ion KW - cathode KW - cavity KW - ISOL KW - simulation DA - 2018/01 PY - 2018 SN - 978-3-95450-191-5 DO - 10.18429/JACoW-SRF2017-THPB048 UR - http://jacow.org/srf2017/papers/thpb048.pdf ER -