The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - CONF AU - Yang, Z.Q. AU - Lu, X.Y. AU - Tan, W.W. AU - Yang, D.Y. AU - Yang, Y. AU - Zhao, J. ED - Schaa, Volker RW ED - He, Yuan ED - Li, Lu ED - Zhao, Ning TI - XPS Studies of Nitrogen Doping Nb Samples before and after GCIB Etching J2 - Proc. of SRF2017, Lanzhou, China, July 17-21, 2017 C1 - Lanzhou, China T2 - International Conference on RF Superconductivity T3 - 18 LA - english AB - The surface chemical composition of nitrogen doping Nb samples used for the fabrication of superconducting radio frequency (SRF) cavities, followed by the subsequent successive EP with different amounts of material removal, has been studied by XPS. The chemical composition of Nb, O, C and N was presented before and after Gas Cluster Ion Beams (GCIB) etching. No signals of bad superconducting nitrides NbNx was found in any doped and un-doped samples before etching. However, in the depth range greater than 30nm, the content of N elements is below the XPS detection precision scope even in the samples directly after nitrogen doping treatment. PB - JACoW CP - Geneva, Switzerland SP - 802 EP - 804 KW - ion KW - niobium KW - cavity KW - SRF KW - electron DA - 2018/01 PY - 2018 SN - 978-3-95450-191-5 DO - 10.18429/JACoW-SRF2017-THPB029 UR - http://jacow.org/srf2017/papers/thpb029.pdf ER -