Paper | Title | Page |
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TUP49 | ECR Plasma Cleaning: An In-situ Processing Technique for RF Cavities | 243 |
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A condition for Electron Cyclotron Resonance (ECR) can be established inside a fully assembled RF cavity without the need for removing high-power couplers. As such, plasma generated by this process can be used as a final cleaning step, or as an alternative cleaning step in place of other techniques. We will describe the current effort to study plasma cleaning by ECR in a 3.9GHz cavity. |