| Paper | Title | Page |
|---|
| WE202 | Different sputtering configurations for coating 1.5 GHZ copper cavities | 384 |
| | - G. Lanza, V. Palmieri, N. Patron, C. Pira, S. Stark
Laboratori Nazionali di Legnaro, STITUTO NAZIONALE DI FISICA NUCLEARE - E. Bemporad, F. Carassiti, M. Sebastiani
University of Rome - H. Padamsee
Cornell University
| |
| | In the framework of the attempts to densify the
sputtering discharge, two different sputtering
configuration are reported:
- a mixed bias magnetron sputtering technique has been
explored for depositing niobium into 1,5 GHz copper
cavities. Results are presented and compared with the
standard CERN technique. The superconducting and high
resolution morphological and mechanical properties of
niobium films sputtered onto the inner walls of
electropolished cavities, have been studied as a function
of the deposition technique. Even if niobium films coated
with the bias technique show a higher density and Tc
similar to the other films, they don't present higher RRR
values. Preliminary RF tests are presented.
- post Magnetron sputtering in thermoelectric emission
regime have been investigated and is under improvement
in order to increase the RRR values of sputtered Nb:
superconducting and structural properties of the obtained
films have been measured to check the technique
capability and its possible application for coating cavities. | |
 | Slides(PDF) | |