Paper |
Title |
Page |
WEPSB26 |
Study of Possibility of Industrial Application of Ion Injector I-3 |
217 |
|
- P.N. Alekseev
ITEP, Moscow, Russia
|
|
|
Ions injector I-3 of the ITEP-TWAC accelerator complex consists of a buncher, two-gap accelerating cavity and a beam transport line. Laser ion source is used to generate ions for the injector. Possibility of application of the injector to dope semiconductor materials with variable energy ions is considered. Results of beam parameters optimization by numerical simulation to produce uniform distribution of particles density and required energy spread on the target are presented.
|
|
|