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Kumar, A. K.

Paper Title Page
THPMN019 Morphological Changes of Electron-beam Irradiated PMMA Surface 2745
  • R. Nathawat, A. K. Kumar, Y. K. Vijay
    UOR, Jaipur
  Funding: Author are thankful to DAE-BRNS, India for financial support for research work

Atomic force microscopy (AFM) study of low energy (10 keV) electron beam irradiated Polymethylmethacrylate (PMMA)20 micron thick surface was performed. PMMA film has been used in lithography applicatiion by this technique. AFM in tapping mode has been utilized to investigate the morphological changes on the samples surface as a function of fluence. TM-AFM showed the hills of the nano size surrounded by the craters type features in all the irradiated samples. The shape and size of these features varied with fluence. The root-mean-square (rms) surface roughness of the samples changed from 2.666 nm to 5.617 nm with fluence from 2x1014 electrons/cm2 to 1x1016 electrons/cm2. It shows that roughness increases as increasing fluence.