Paper | Title | Page |
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THPMN037 | Development of Compact EUV Source based on Laser Compton Scattering | 2799 |
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High-power extreme ultraviolet (EUV) source is required for next generation semiconductor lithography. We start to develop a compact EUV source in the spectral range of 13-14 nm, which is based on laser Compton scattering between a 7 MeV electron beam and a high intensity CO2 laser pulse. Electron beam is pre-bunched using two different wavelengths of laser pulses with a dispersion section of beam transport line*,**. In this conference, we describe the results of numerical study for the EUV source and a plan of test experiment generating micro-bunched electron beam.
*M. Goldstein et al., Proc. of the 27th Int. FEL conference, Stanford, California, USA (2005) pp.422-425**A. Endo, Sematic EUV source workshop, Barcelona, Spain (2006) |