Author: Zhang, D.N.
Paper Title Page
TUPYP019
Optical Metrology of High Energy Photon Source  
 
  • C.R. Zhang, R.L. Cui, M. Li, D.N. Zhang
    IHEP, Beijing, People’s Republic of China
 
  Funding: High Energy Photon Source Platform of Advanced Photon Source technology research and development Beijing Synchrotron Radiation Facility, Institute of High Energy Physics
The fourth-generation synchrotron light sources-High Energy Photon Source(HEPS) requires the accuracy of X-ray mirror surface slope and height error to be as high as 50 nrad(rms) and 0.4nm (rms), respectively. Its a huge challenge to detect the X-ray mirrors with such high-precision specification. A new type long trace profiler named FSP (Flag-type Surface Profiler), which is independently developed by Institute of High Energy Physics, Chinese Academy of Sciences, providing high-precision surface shape Metrology services for the X-mirrors of HEPS. So far, we have completed the surface shape Metrology of 25 HEPS high-precision X-ray mirrors, and the surface shape Metrology of FSP were also recognize approved by JTEC. Among them, the Wolter diffraction limit focusing mirror processed by JTEC Company in Japan, the height error is 0.1nm RMS at 1mm high spatial resolution (0.11nm RMS for Wolter KB elliptic area and 0.12nm RMS for hyperbolic area). So far this is the most accurate X-ray mirror for HEPS. At the same time, we also developed the Spatial Frequency decomposition stitching Interferometer (FSI), the standard deviation of surface shape Metrology of FSP and FSI reached 0.33nm.
 
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