Paper | Title | Page |
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THOAM03 |
Magnetically Levitated 6 DoF Controlled Sample Manipulator for Tomography | |
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Tomography is a crucial imaging technique in modern synchrotrons. The latest, 4th generation, offers nanometer imaging resolution and fast data acquisition. However, existing sample manipulators mostly rely on quasistatic actuation principles and are constructed by stacking straightforward 1 DoF stages. Such stacking lacks the required dynamics performance and precision. To fill this need, MI-Partners developed a fully actively controlled (6 DoF) sample manipulator based on electro-magnetic actuation and a metrology system that ensures nanometer precision. It provides translational motion with a stroke of 3 mm and endless continues rotation around the vertical axis for full 360-deg angular tomography reconstruction. The novel actuator configuration has a circular magnet yoke which creates a radial polarized magnet field. Multiple sets of coils, acting as individual 3 phase motors, enabling independent control of 3 vertical and 3 tangential forces. The metrology system includes a tracking intermediate metrology frame. A set of capacitive sensors and interferometers enabling full 360 deg. rotation while allowing 3 mm radial movements and still reaching nanometer precision. | ||
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