JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
@unpublished{na:medsi2023-weppp056,
author = {D.H. Na and B.J. Kim and S.H. Kim and S.B. Lee and Y.J. Park},
title = {{PAL-EUV Vacuum System}},
% booktitle = {Proc. MEDSI'23},
booktitle = {Proc. Int. Conf. Mech. Eng. Design Synchrotron Radiat. Equip. Instrum. (MEDSI'23)},
eventdate = {2023-11-06/2023-11-10},
language = {english},
intype = {presented at the},
series = {International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation},
number = {12},
venue = {Beijing, China},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {07},
year = {2024},
note = {presented at MEDSI'23 in Beijing, China, unpublished},
abstract = {{The PAL-EUV accelerator consists of a linear accelerator, booster, and storage-ring, including an injector. The electron beam generated by the injector laser is accelerated to 20 MeV in the linear accelerator, then its energy is raised to 400 MeV in the booster before being injected into the storage-ring. The electron beam injected into the storage-ring emits the photons used in the beamline as it passes through the insertion device. All vacuum devices, chambers, and supports for EUV have been manufactured, and individual vacuum leak tests have been completed for both the chambers and the vacuum devices. Currently, all vacuum devices and supports have been installed. Additionally, based on vacuum simulation results, vacuum components such as ion pumps, vacuum gauges, and vacuum valves have been positioned and the required vacuum levels for each section have been satisfied. Specifically, Baking and NEG activation procedures were performed to reach the required vacuum levels for storage-ring, thus achieving the vacuum level required for the EUV accelerator}},
}