JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - UNPB AU - Li, J. AU - Chen, Y. AU - Hao, X.R. AU - He, J.H. AU - Li, H. AU - Li, H.H. AU - Liu, C.Y. AU - Nie, Y. AU - Wang, J. AU - Wang, Y. AU - Wei, G. AU - Xiang, P. AU - Zhang, J.M. AU - Zhang, Y.X. AU - Zou, Y. ED - Schaa, Volker R.W. ED - Bian, Lin ED - Chen, Zhichu ED - Dong, Yuhui ED - He, Ping TI - The Pumping Properties of Ti-Zr-V Non-Evaporable Getter Film Coated Vacuum Chambers J2 - Proc. of MEDSI2023, Beijing, China, 06-10 November 2023 CY - Beijing, China T2 - International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 12 LA - english AB - Wuhan Advanced Light Source (WALS) is a fourth-generation synchrotron radiation facility with 1.5 GeV designed energy and 500 mA beam current. In order to meet specific requirements, most of the vacuum chambers for the WALS 1.5 GeV storage ring are small aperture tubes. To achieve the vacuum requirement, the technology of non-evaporable getter (NEG) films deposited on the inner wall of chambers to deal with the small aperture of vacuum chambers. In this paper, the ternary Ti-Zr-V getter film was deposited on the stainless-steel tubes by using a developed cylindrical magnetron sputtering system. Microstructure characterizations were obtained by scanning electron microscopy. The pumping property for H₂ and CO of the films with different surface morphologies (dense and columnar) activated at various temperature were tested by the pumping property evaluate facility. The result in this paper indicated that the columnar films have a better pumping performance compared with the dense films. With the number of activations increases, the pumping performance decreases. To achieve the same pumping performance, the increase of the activation temperature or activation time is needed. PB - JACoW Publishing CP - Geneva, Switzerland ER -