JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - UNPB AU - Kikuchi, T. AU - Kataoka, K. AU - Mase, K. AU - Nitani, H. AU - Ohigashi, T. AU - Ono, M. AU - Sakurai, T. AU - Tanaka, H. AU - Uezono, N. AU - Yoshikawa, I. AU - Yoshioka, K. ED - Schaa, Volker R.W. ED - Bian, Lin ED - Chen, Zhichu ED - Dong, Yuhui ED - He, Ping TI - Application of Surface-Partially Nitrided High-Purity Ti as a Nonevaporable Getter for Synchrotron Radiation Beamline J2 - Proc. of MEDSI2023, Beijing, China, 06-10 November 2023 CY - Beijing, China T2 - International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 12 LA - english AB - Nonevaporable getter (NEG) pumps are widely used in synchrotron radiation facilities because they are oil-free, vibration-free, space-saving, lightweight, and energy-saving. When a NEG thin film is deposited on the inner wall of a vacuum duct, the residual active gases are pumped after baking. Recently we have developed a new NEG thin film that was prepared by the following simple procedure, sublimation of high-purity Ti under UHV in the range of 10⁻⁷ to 10-8 Pa, followed by N₂ introduction., We confirmed that partially nitrided high-purity Ti coating on inner surface of a vacuum vessel pumped H₂, H₂O, O₂ gases, and CO even after 30 cycles of pumping, baking at 185 °C for 6 hours, cooling down to room temperature, introduction of high-purity N₂, and exposure to air. In the present study, we applied surface-partially nitrided high-purity Ti on the inner surface of the vacuum ducts in the upstream section of BL-12C in the Photon Factory 2.5 GeV ring and baked them at 250°C. Pressure in the section reached ultrahigh vacuum of 2.2×10-8 Pa without ion pumps after isolation from the turbomolecular pump with gate valve. PB - JACoW Publishing CP - Geneva, Switzerland ER -