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@unpublished{kikuchi:medsi2023-weppp042,
author = {T. Kikuchi and K. Kataoka and K. Mase and H. Nitani and T. Ohigashi and M. Ono and T. Sakurai and H. Tanaka and N. Uezono and I. Yoshikawa and K. Yoshioka},
% author = {T. Kikuchi and K. Kataoka and K. Mase and H. Nitani and T. Ohigashi and M. Ono and others},
% author = {T. Kikuchi and others},
title = {{Application of Surface-Partially Nitrided High-Purity Ti as a Nonevaporable Getter for Synchrotron Radiation Beamline}},
% booktitle = {Proc. MEDSI'23},
booktitle = {Proc. Int. Conf. Mech. Eng. Design Synchrotron Radiat. Equip. Instrum. (MEDSI'23)},
eventdate = {2023-11-06/2023-11-10},
language = {english},
intype = {presented at the},
series = {International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation},
number = {12},
venue = {Beijing, China},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {07},
year = {2024},
note = {presented at MEDSI'23 in Beijing, China, unpublished},
abstract = {{Nonevaporable getter (NEG) pumps are widely used in synchrotron radiation facilities because they are oil-free, vibration-free, space-saving, lightweight, and energy-saving. When a NEG thin film is deposited on the inner wall of a vacuum duct, the residual active gases are pumped after baking. Recently we have developed a new NEG thin film that was prepared by the following simple procedure, sublimation of high-purity Ti under UHV in the range of 10⁻⁷ to 10-8 Pa, followed by N₂ introduction., We confirmed that partially nitrided high-purity Ti coating on inner surface of a vacuum vessel pumped H₂, H₂O, O₂ gases, and CO even after 30 cycles of pumping, baking at 185 °C for 6 hours, cooling down to room temperature, introduction of high-purity N₂, and exposure to air. In the present study, we applied surface-partially nitrided high-purity Ti on the inner surface of the vacuum ducts in the upstream section of BL-12C in the Photon Factory 2.5 GeV ring and baked them at 250°C. Pressure in the section reached ultrahigh vacuum of 2.2×10-8 Pa without ion pumps after isolation from the turbomolecular pump with gate valve.}},
}