JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - UNPB AU - Hong, Z. AU - Diao, Q.S. AU - Li, M. AU - Lian, H. ED - Schaa, Volker R.W. ED - Bian, Lin ED - Chen, Zhichu ED - Dong, Yuhui ED - He, Ping TI - Research on High Quality Channel-Cut Crystal Optics for High Energy Photon Source J2 - Proc. of MEDSI2023, Beijing, China, 06-10 November 2023 CY - Beijing, China T2 - International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 12 LA - english AB - In this paper, a machining scheme of magnetically controlled small tool was proposed, which gets rid of the limitation of the power system and transmission system, and realized the free machining of channel-cut crystal with narrow space, a high quality channel-cut crystal with high wavefront maintenance and high transmission efficiency in a large size range was obtained. The results of offline characterization showed that: The roughness of inner surfaces reached 0.6nm RMS; Microstructure analysis show that the perfect lattice substrate was only covered 2.5nm thickness uniform SiO₂ layer, and there was no uneven bending of the oxide layer caused byμstress concentration. The results of online tests showed that: the Darwin widths of the channel-cut crystal processed by MC-CMP were consistent with the theoretical values, the two diffraction reflectivity rate of the crystal reached 85.1\%, very close to the theoretical limit of 88.3\%. The morphology of channel-cut crystal treated by MC-CMP technology was uniform, scratches and spot defects were eliminated completely. The wavefront equivalent crystal profile error of the two diffraction reached 130nrad RMS with 5 mm dimension. PB - JACoW Publishing CP - Geneva, Switzerland ER -