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@unpublished{hong:medsi2023-weppp014, author = {Z. Hong and Q.S. Diao and M. Li and H. Lian}, title = {{Research on High Quality Channel-Cut Crystal Optics for High Energy Photon Source}}, % booktitle = {Proc. MEDSI'23}, booktitle = {Proc. Int. Conf. Mech. Eng. Design Synchrotron Radiat. Equip. Instrum. (MEDSI'23)}, eventdate = {2023-11-06/2023-11-10}, language = {english}, intype = {presented at the}, series = {International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation}, number = {12}, venue = {Beijing, China}, publisher = {JACoW Publishing, Geneva, Switzerland}, month = {07}, year = {2024}, note = {presented at MEDSI'23 in Beijing, China, unpublished}, abstract = {{In this paper, a machining scheme of magnetically controlled small tool was proposed, which gets rid of the limitation of the power system and transmission system, and realized the free machining of channel-cut crystal with narrow space, a high quality channel-cut crystal with high wavefront maintenance and high transmission efficiency in a large size range was obtained. The results of offline characterization showed that: The roughness of inner surfaces reached 0.6nm RMS; Microstructure analysis show that the perfect lattice substrate was only covered 2.5nm thickness uniform SiO₂ layer, and there was no uneven bending of the oxide layer caused byμstress concentration. The results of online tests showed that: the Darwin widths of the channel-cut crystal processed by MC-CMP were consistent with the theoretical values, the two diffraction reflectivity rate of the crystal reached 85.1\%, very close to the theoretical limit of 88.3\%. The morphology of channel-cut crystal treated by MC-CMP technology was uniform, scratches and spot defects were eliminated completely. The wavefront equivalent crystal profile error of the two diffraction reached 130nrad RMS with 5 mm dimension.}}, }