JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
@unpublished{mase:medsi2023-weoam05,
author = {K. Mase and T. Kikuchi and S. Ohno and M. Ono and Y. Sato and I. Yoshikawa and K. Yoshioka},
% author = {K. Mase and T. Kikuchi and S. Ohno and M. Ono and Y. Sato and I. Yoshikawa and others},
% author = {K. Mase and others},
title = {{Zero-Length Conflat Flange Nonevaporable Getter (NEG) Pump Manufactured by Oxygen-Free Pd/Ti Deposition}},
% booktitle = {Proc. MEDSI'23},
booktitle = {Proc. Int. Conf. Mech. Eng. Design Synchrotron Radiat. Equip. Instrum. (MEDSI'23)},
eventdate = {2023-11-06/2023-11-10},
language = {english},
intype = {presented at the},
series = {International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation},
number = {12},
venue = {Beijing, China},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {07},
year = {2024},
note = {presented at MEDSI'23 in Beijing, China, unpublished},
abstract = {{Nonevaporable getter (NEG) pumps are widely used to maintain ultrahigh vacuum (UHV). Commercial NEG pumps using ZrVFe alloy can be activated by heating at 400¿500 °C, and pump active residual gases such as H₂, H₂O, CO₂, CO, N₂, and so on at room temperature (RT). Recently T. Miyazawa, T. Kikuchi, K. Mase et al. have developed a new NEG, Pd overcoated on Ti thin film with a purity higher than 99.95\% (oxygen-free Pd/Ti hereafter), which pumps H₂ and CO at RT after baking at 133 °C for 12 hours. Then we developed a zero-length conflat flange NEG pump deposited with oxygen-free Pd/Ti. The NEG pump can be fully activated by baking at 150 °C for 12 h and exhibits initial pumping speeds of 2340 L s¿1 for H₂, and 1440 L s¿1 for CO. The initial pumping speeds of the oxygen-free Pd/Ti thin film after baking at 150 °C were estimated to be 3.2 L s¿1 cm¿2 for H₂ and 7.6 L s¿1 cm¿2 for CO. The present NEG pump is ideal for maintaining UHV below 10¿8 Pa, because its pumping speeds for H₂ and CO are quite large, and because it can be fully activated by baking at 150 °C for 12 h.}},
}