JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Wei, G. AU - Chen, Y. AU - Hao, X.R. AU - He, J.H. AU - Li, H. AU - Li, H.H. AU - Li, J. AU - Liu, C.Y. AU - Nie, Y. AU - Wang, J. AU - Wang, Y. AU - Xiang, P. AU - Xu, Y. AU - Zhang, J.M. AU - Zhang, Y.X. AU - Zou, Y. ED - Schaa, Volker R.W. ED - Bian, Lin ED - Chen, Zhichu ED - Dong, Yuhui ED - He, Ping TI - Progress of WALS NEG Coating Equipment and Technology J2 - Proc. of MEDSI2023, Beijing, China, 06-10 November 2023 CY - Beijing, China T2 - International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 12 LA - english AB - The goal of WALS (Wuhan Advanced Light Source) is to build a world -class radiating light source. Chromium-zirconium-copper was chosen as the main material for the entire storage ring vacuum vessels. And magnetron sputtering (PVD) process was used to deposit NEG coating on the inner surface of copper vacuum chamber, which can further improve the performance of the vacuum. At present, the coating laboratory has taken shape as a whole, and has built a standard cleaning platform, coating platform, ultimate vacuum test platform, extraction rate test platform, coating microstructure test process. As for the coating equipment, bias power supply and custom ceramic parts are added to achieve more functions. Different target materials were controlled by multi-electrode control, while experiments were performed on deposited compositions of different ratios of multilayers; Sample tube bias control access during the coating process; Multiple combinations of target materials and bias parameters for the technique have been studied. Coating is currently underway, and specific test results are in progress. PB - JACoW Publishing CP - Geneva, Switzerland SP - 108 EP - 110 KW - vacuum KW - controls KW - target KW - experiment KW - site DA - 2024/07 PY - 2024 SN - 2673-5520 SN - 978-3-95450-250-9 DO - doi:10.18429/JACoW-MEDSI2023-TUPYP051 UR - https://jacow.org/medsi2023/papers/tupyp051.pdf ER -