JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
@inproceedings{wei:medsi2023-tupyp051,
author = {G. Wei and Y. Chen and X.R. Hao and J.H. He and H. Li and H.H. Li and J. Li and C.Y. Liu and Y. Nie and J. Wang and Y. Wang and P. Xiang and Y. Xu and J.M. Zhang and Y.X. Zhang and Y. Zou},
% author = {G. Wei and Y. Chen and X.R. Hao and J.H. He and H. Li and H.H. Li and others},
% author = {G. Wei and others},
title = {{Progress of WALS NEG Coating Equipment and Technology}},
% booktitle = {Proc. MEDSI'23},
booktitle = {Proc. 12th Int. Conf. Mech. Eng. Design Synchrotron Radiat. Equip. Instrum. (MEDSI'23)},
eventdate = {2023-11-06/2023-11-10},
pages = {108--110},
paper = {TUPYP051},
language = {english},
keywords = {vacuum, controls, target, experiment, site},
venue = {Beijing, China},
series = {International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation},
number = {12},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {07},
year = {2024},
issn = {2673-5520},
isbn = {978-3-95450-250-9},
doi = {10.18429/JACoW-MEDSI2023-TUPYP051},
url = {https://jacow.org/medsi2023/papers/tupyp051.pdf},
abstract = {{The goal of WALS (Wuhan Advanced Light Source) is to build a world -class radiating light source. Chromium-zirconium-copper was chosen as the main material for the entire storage ring vacuum vessels. And magnetron sputtering (PVD) process was used to deposit NEG coating on the inner surface of copper vacuum chamber, which can further improve the performance of the vacuum. At present, the coating laboratory has taken shape as a whole, and has built a standard cleaning platform, coating platform, ultimate vacuum test platform, extraction rate test platform, coating microstructure test process. As for the coating equipment, bias power supply and custom ceramic parts are added to achieve more functions. Different target materials were controlled by multi-electrode control, while experiments were performed on deposited compositions of different ratios of multilayers; Sample tube bias control access during the coating process; Multiple combinations of target materials and bias parameters for the technique have been studied. Coating is currently underway, and specific test results are in progress.}},
}