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TY - CONF AU - Liu, R.H. AU - He, H.Y. AU - Kang, L. AU - Ke, Z.Y. AU - Liu, L. AU - Nie, X.J. AU - Ning, C.J. AU - Wang, A.X. AU - Wang, G.Y. AU - Yu, Y.J. AU - Zhang, J.S. AU - Zhu, D.H. ED - Jaski, Yifei ED - Den Hartog, Patric ED - Jaje, Kelly ED - Schaa, Volker R.W. TI - Study the Active Vibration Control System of the Parallel 6-DOF Platform J2 - Proc. of MEDSI2020, Chicago, IL, USA, 24-29 July 2021 CY - Chicago, IL, USA T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 11 LA - english AB - With the development of high-energy synchrotron radiation light source with high energy, high brightness, low emittance and nano-scale light spot, accelerators and beamline stations have higher requirements for the stability of the system, and active vibration isolation technology has been paid more and more attention. It has become the key technology for the development of major scientific devices (such as high-energy synchrotron radiation light source, free electron laser, etc.) in the future. In this paper, an active vibration control system driven by piezoelectric ceramic actuator with strong adaptability is designed. NI Compact-RIO real-time control system and Fx-LMS adaptive filter control algorithm are used for the active vibration control system. The identification method of input and output channels and the active control module are simulated by MATLAB. And an active vibration control system based on a parallel 6-DOF platform was built for experimental verification. The experimental results show that the designed active vibration control system has a good control effect for low-frequency micro-vibration. PB - JACoW Publishing CP - Geneva, Switzerland SP - 131 EP - 134 KW - controls KW - experiment KW - damping KW - software KW - synchrotron DA - 2021/10 PY - 2021 SN - 2673-5520 SN - 978-3-95450-229-5 DO - doi:10.18429/JACoW-MEDSI2020-TUPA06 UR - https://jacow.org/medsi2020/papers/tupa06.pdf ER -