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https://doi.org/10.18429/JACoW-MEDSI2020-TUPC10
Title Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics
Authors
  • D. Shu, J.W.J. Anton, L. Assoufid, S.J. Bean, D. Capatina, V. De Andrade, E.M. Dufresne, T. Graber, R. Harder, D. Haskel, K. Jasionowski, S.P. Kearney, A.A. Khan, B. Lai, W. Liu, J. Maser, S.T. Mashrafi, G.K. Mistri, S. Narayanan, C.A. Preissner, M. Ramanathan, L. Rebuffi, R. Reininger, O.A. Schmidt, X. Shi, J.Z. Tischler, K.J. Wakefield, D. Walko, J. Wang, X. Zhang
    ANL, Lemont, Illinois, USA
Abstract Kirkpatrick and Baez (K-B) mirror-based nanofocusing optics* will be applied to many beamlines endstation instruments for the APS-Upgrade (APS-U) project. Precision nanopositioning stages with nanometer-scale linear positioning resolution and nanoradian-scale angular stability are needed as alignment apparatus for the K-B mirror hard X-ray nanofocusing optics. For instance, at the APS-U 19-ID In Situ Nanoprobe beamline endstation**, to maintain stability of a 20-nm focal spot on the sample, nanofocusing K-B mirror system with 5-nrad angular stability is required. Similar angular resolution and stability are also required for APS-U 9-ID CSSI***, APS-U 34-ID ATOMIC**** and other beamline endstation instruments. Modular nanopositioning flexure stages have been developed for the K-B mirror nanofocusing optics, which includes: linear vertical and horizontal flexure stages, tip-tilting flexure stages, and flexure mirror benders for bendable nanofocusing K-B mirrors, to overcome the performance limitations of precision ball-bearing-based or roller-bearing-based stage systems. The mechanical design and preliminary test results are described in this paper.
Footnotes & References * Kirkpartrick and Baez, JOSA. 1948; 38(9): 766-773.
** S. Kearney et al., this conference.
*** J. Anton et al., this conference.
**** C. Preissner et al., this conference.
Funding Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357.
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Conference MEDSI2020
Series Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation (11th)
Location Chicago, IL, USA
Date 24-29 July 2021
Publisher JACoW Publishing, Geneva, Switzerland
Editorial Board Yifei Jaski (ANL, Lemont, IL, USA); Patric Den Hartog (ANL, Lemont, IL, USA); Kelly Jaje (ANL, Lemont, IL, USA); Volker R.W. Schaa (GSI, Darmstadt, Germany)
Online ISBN 978-3-95450-229-5
Online ISSN 2673-5520
Received 02 August 2021
Accepted 21 October 2021
Issue Date 31 October 2021
DOI doi:10.18429/JACoW-MEDSI2020-TUPC10
Pages 199-202
Copyright
Creative Commons CC logoPublished by JACoW Publishing under the terms of the Creative Commons Attribution 3.0 International license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI.