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|Title||Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics|
|Abstract||Kirkpatrick and Baez (K-B) mirror-based nanofocusing optics* will be applied to many beamlines endstation instruments for the APS-Upgrade (APS-U) project. Precision nanopositioning stages with nanometer-scale linear positioning resolution and nanoradian-scale angular stability are needed as alignment apparatus for the K-B mirror hard X-ray nanofocusing optics. For instance, at the APS-U 19-ID In Situ Nanoprobe beamline endstation**, to maintain stability of a 20-nm focal spot on the sample, nanofocusing K-B mirror system with 5-nrad angular stability is required. Similar angular resolution and stability are also required for APS-U 9-ID CSSI***, APS-U 34-ID ATOMIC**** and other beamline endstation instruments. Modular nanopositioning flexure stages have been developed for the K-B mirror nanofocusing optics, which includes: linear vertical and horizontal flexure stages, tip-tilting flexure stages, and flexure mirror benders for bendable nanofocusing K-B mirrors, to overcome the performance limitations of precision ball-bearing-based or roller-bearing-based stage systems. The mechanical design and preliminary test results are described in this paper.|
|Footnotes & References||* Kirkpartrick and Baez, JOSA. 1948; 38(9): 766-773.
** S. Kearney et al., this conference.
*** J. Anton et al., this conference.
**** C. Preissner et al., this conference.
|Funding||Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357.|
|Paper||download TUPC10.PDF [1.558 MB / 4 pages]|
|Export||download ※ BibTeX ※ LaTeX ※ Text/Word ※ RIS ※ EndNote|
|Series||Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation (11th)|
|Location||Chicago, IL, USA|
|Date||24-29 July 2021|
|Publisher||JACoW Publishing, Geneva, Switzerland|
|Editorial Board||Yifei Jaski (ANL, Lemont, IL, USA); Patric Den Hartog (ANL, Lemont, IL, USA); Kelly Jaje (ANL, Lemont, IL, USA); Volker R.W. Schaa (GSI, Darmstadt, Germany)|
|Received||02 August 2021|
|Accepted||21 October 2021|
|Issue Date||31 October 2021|