Joint Accelerator Conferences Website

The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.

Title	Modular Nanopositioning Flexure Stages Development for APS Upgrade K-B Mirror Nanofocusing Optics
Authors	D. Shu, J.W.J. Anton, L. Assoufid, S.J. Bean, D. Capatina, V. De Andrade, E.M. Dufresne, T. Graber, R. Harder, D. Haskel, K. Jasionowski, S.P. Kearney, A.A. Khan, B. Lai, W. Liu, J. Maser, S.T. Mashrafi, G.K. Mistri, S. Narayanan, C.A. Preissner, M. Ramanathan, L. Rebuffi, R. Reininger, O.A. Schmidt, X. Shi, J.Z. Tischler, K.J. Wakefield, D. Walko, J. Wang, X. Zhang ANL, Lemont, Illinois, USA
Abstract	Kirkpatrick and Baez (K-B) mirror-based nanofocusing optics* will be applied to many beamlines endstation instruments for the APS-Upgrade (APS-U) project. Precision nanopositioning stages with nanometer-scale linear positioning resolution and nanoradian-scale angular stability are needed as alignment apparatus for the K-B mirror hard X-ray nanofocusing optics. For instance, at the APS-U 19-ID In Situ Nanoprobe beamline endstation**, to maintain stability of a 20-nm focal spot on the sample, nanofocusing K-B mirror system with 5-nrad angular stability is required. Similar angular resolution and stability are also required for APS-U 9-ID CSSI***, APS-U 34-ID ATOMIC**** and other beamline endstation instruments. Modular nanopositioning flexure stages have been developed for the K-B mirror nanofocusing optics, which includes: linear vertical and horizontal flexure stages, tip-tilting flexure stages, and flexure mirror benders for bendable nanofocusing K-B mirrors, to overcome the performance limitations of precision ball-bearing-based or roller-bearing-based stage systems. The mechanical design and preliminary test results are described in this paper.
Footnotes & References	* Kirkpartrick and Baez, JOSA. 1948; 38(9): 766-773. ** S. Kearney et al., this conference. *** J. Anton et al., this conference. **** C. Preissner et al., this conference.
Funding	Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357.
Paper	download TUPC10.PDF [1.558 MB / 4 pages]
Export	download ※ BibTeX ※ LaTeX ※ Text/Word ※ RIS ※ EndNote
Conference	MEDSI2020
Series	Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation (11th)
Location	Chicago, IL, USA
Date	24-29 July 2021
Publisher	JACoW Publishing, Geneva, Switzerland
Editorial Board	Yifei Jaski (ANL, Lemont, IL, USA); Patric Den Hartog (ANL, Lemont, IL, USA); Kelly Jaje (ANL, Lemont, IL, USA); Volker R.W. Schaa (GSI, Darmstadt, Germany)
Online ISBN	978-3-95450-229-5
Online ISSN	2673-5520
Received	02 August 2021
Accepted	21 October 2021
Issue Date	31 October 2021
DOI	doi:10.18429/JACoW-MEDSI2020-TUPC10
Pages	199-202
Copyright	Published by JACoW Publishing under the terms of the Creative Commons Attribution 3.0 International license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI.