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TY - UNPB AU - Doehrmann, R. AU - Botta, S. AU - Falkenberg, G. AU - Garrevoet, J. AU - Kahnt, M. AU - Lyubomirskiy, M. AU - Scholz, M. AU - Schroer, C.G. AU - Schropp, A. AU - Seyrich, M. AU - Wiljes, P. ED - Schaa, Volker RW ED - Tavakoli, Keihan ED - Tilmont, Manuel TI - PtyNAMi: Ptychographic Nano-Analytical Microscope at PETRA III -How to Achieve Sub-nanometer Sample Stability J2 - Proc. of MEDSI2018, Paris, France, 25-29 June 2018 C1 - Paris, France T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 10 LA - english AB - In recent years, ptychography has been established as a method in X-ray microscopy to achieve a spatial resolution even below the diffraction limit of x-ray optics, down to a few nm. This requires, among other things, an extremely high degree of mechanical stability, a low background signal from the x-ray microscope and highest demands on the beam guiding and focusing optics. PtyNAMi is the new generation hard x-ray scanning microscope at beamline P06 of PETRA III at DESY combining a sample scanner designed for maximal stability, a new detector system designed to reduce background signals, and an interferometric position control of sample and X-ray optics. The interferometer system enables tracking the sample position relative to the optics in scanning microscopy and tomography on all relevant time scales. This is crucial for high-resolution scanning x-ray microscopy to track vibrations and long-term drifts in the noisy environment of a synchrotron radiation source in user operation. We present the design concept in detail with a special focus on real-time metrology of the sample position during 3D x-ray scanning microscopy using a ball-lens retroreflector. PB - JACoW Publishing CP - Geneva, Switzerland ER -