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The acceleration gradient of a linac is limited by rf breakdown in its accelerating structure. We applied an imaging spectrograph system to study the mechanism of rf breakdown phenomena in accelerating rf structures. Excited outgases emit light during rf breakdown, and the type of outgases depend on surface treatments and rinsing methods for their materials. To study rf breakdown, we used 2-m-long accelerating structures and investigated the effects when high-pressure ultrapure water rinsing (HPR) treatment was applied to these rf structures. We performed experiments to study the outgases under rf conditioning with quadruple mass spectroscopy and imaging spectrography. As a result, we could observe instantly increasing signals at mass numbers of 2 (H2), 28 (CO), and 44 (CO2), but not 18 (H2O) just after the rf breakdown. We also conducted spectral imaging for the light emissions from the atoms in a vacuum that are excited by rf breakdown. Without HPR, we observed the atomic lines at 511 nm (Cu I), 622 nm (Cu II), and 711 nm (C I). With HPR, 395 nm (O I), 459 nm (O II), 511 nm (Cu I), 538 nm (C I), 570 nm (Cu I), 578 nm (Cu I), 656 nm (H I), and 740 nm (Cu II) were observed.
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