Xinyu Jin (University of Science and Technology of China)
TUPR21
Influence of deposition parameters on the microstructure and vacuum properties of NEG-coated vacuum chamber
1460
The non-evaporable getter (NEG) coatings provide conductance-free evenly distributed pumping, low thermal outgassing rates, second electron yield, and photon-and electron-stimulated desorption. NEG coatings are crucial for achieving ultrahigh vacuum in fourth-generation diffraction storage ring vacuum systems. TiZrV thin films were deposited onto elongated CuCrZr pipes for this investigation. The influence of various deposition parameters on the microstructure and vacuum properties of NEG coatings was investigated. The microstructure, surface topography, roughness, and phase composition were evaluated using Scanning Electron Microscopy (SEM), Energy Dispersive Spectroscopy (EDS), Atomic Force Microscope (AFM), and X-ray Diffraction (XRD), respectively. Furthermore, the activation performance of the TiZrV films was investigated in relation to deposition parameters.
  • X. Xu, T. Guo, X. Jin, W. Ma, L. Fan, Y. Hong, Z. Cao, S. Wang
    University of Science and Technology of China
Paper: TUPR21
DOI: reference for this paper: 10.18429/JACoW-IPAC2024-TUPR21
About:  Received: 14 May 2024 — Revised: 17 May 2024 — Accepted: 18 May 2024 — Issue date: 01 Jul 2024
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