JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Tanaka, O.A. AU - Miyajima, T. AU - Nakamura, N. AU - Tanikawa, T. ED - Zimmermann, Frank ED - Tanaka, Hitoshi ED - Sudmuang, Porntip ED - Klysubun, Prapong ED - Sunwong, Prapaiwan ED - Chanwattana, Thakonwat ED - Petit-Jean-Genaz, Christine ED - Schaa, Volker R.W. TI - Injector Design Towards ERL-Based EUV-FEL for Lithography J2 - Proc. of IPAC2022, Bangkok, Thailand, 12-17 June 2022 CY - Bangkok, Thailand T2 - International Particle Accelerator Conference T3 - 13 LA - english AB - A high-power EUV light source using ERL-based FEL can supply multiple semiconductor exposure de-vices. There are some requirements in the whole and its injector, in particular, and their examination and necessary development are being carried out. The requirement for the injector was to generate high bunch charge beams at a high-repetition rate. In this regard, a space charge effect should be treated carefully in the design of the injector. For FEL operation, not only short bunch length and small transverse emittance but also small longitudinal emittance are required. By using a multi-objective genetic algorithm, we are minimizing them at the exit of the injector to investigate the injector performance and its effect on the FEL generation. In this study, we describe the injector optimization strategies and possible options suited for the ERL-based EUV-FEL. PB - JACoW Publishing CP - Geneva, Switzerland SP - 2299 EP - 2302 KW - emittance KW - cavity KW - electron KW - FEL KW - solenoid DA - 2022/07 PY - 2022 SN - 2673-5490 SN - 978-3-95450-227-1 DO - doi:10.18429/JACoW-IPAC2022-WEPOMS025 UR - https://jacow.org/ipac2022/papers/wepoms025.pdf ER -