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TY - CONF AU - Kamiya, J. AU - Takano, T. AU - Wada, K. AU - Yuza, H. ED - Liu, Lin ED - Byrd, John M. ED - Neuenschwander, Regis T. ED - Picoreti, Renan ED - Schaa, Volker R. W. TI - Some Methods of Making Titanium Vacuum Chamber Act as Getter Pump for UHV/XHV J2 - Proc. of IPAC2021, Campinas, SP, Brazil, 24-28 May 2021 CY - Campinas, SP, Brazil T2 - International Particle Accelerator Conference T3 - 12 LA - english AB - The non-evaporable getter (NEG) coating has been developed in CERN to make a beam pipe act as a distributed vacuum pump by coating the getter materials with the ability to adsorb/absorb gas molecules on the beam pipe surface. The NEG coating materials used in the LHC are alloys of titanium, zirconium, and vanadium. In high-power beam accelerators, titanium has been used as the beam pipe chamber material due to its low radio activation characteristics. The ordinal titanium surface has no getter function because it is covered with a titanium oxide film. The new technique, which removes the titanium-oxide surface by some methods, such as baking or sputtering, has been investigated. The dependence of the surface oxide film and the getter characteristics on the baking temperature have been measured. Also, by sputtering the inner surface of the titanium chamber, clear evidence that shows the chamber acts as a vacuum pump has been obtained. Furthermore, the NEG coating on the pure titanium surface can suppress the rapid decrease of the sticking probability by the repeated air purge and reactivation. PB - JACoW Publishing CP - Geneva, Switzerland SP - 3471 EP - 3474 KW - vacuum KW - ECR KW - electron KW - experiment KW - hadron DA - 2021/08 PY - 2021 SN - 2673-5490 SN - 978-3-95450-214-1 DO - doi:10.18429/JACoW-IPAC2021-WEPAB337 UR - https://jacow.org/ipac2021/papers/wepab337.pdf ER -