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TY - CONF AU - Losev, A.A. AU - Alekseev, P.N. AU - Alexeev, N.N. AU - Kulevoy, T. AU - Lagov, P.B. AU - Letovaltseva, M.E. AU - Milyachenko, A.D. AU - Pavlov, Y.S. AU - Satov, Yu.A. AU - Shumshurov, A. ED - Liu, Lin ED - Byrd, John M. ED - Neuenschwander, Regis T. ED - Picoreti, Renan ED - Schaa, Volker R. W. TI - Carbon Beam at I-3 Injector for Semiconductor Implantation J2 - Proc. of IPAC2021, Campinas, SP, Brazil, 24-28 May 2021 CY - Campinas, SP, Brazil T2 - International Particle Accelerator Conference T3 - 12 LA - english AB - Carbon implantation can be effectively used for axial minority charge carriers lifetime control in various silicon bulk and epitaxial planar structures. When carbon is implanted, more stable recombination centers are formed and silicon is not doped with additional impurities, as for example, when irradiated with protons or helium ions. Economically, such a process competes with alternative methods, and is more efficient for obtaining small lifetimes (several nanoseconds). I-3 ion injector with laser-plasma ion source in Institute for theoretical and experimental physics (ITEP) is used as ion implanter in semiconductors. The ion source uses pulsed CO₂ laser setup with radiation-flux density of 10¹¹ W/cm² at target surface. The ion source produces beams of various ions from solid targets. The generated ion beam is accelerated in the two gap RF resonator at voltage of up to 2 MV per gap. Resulting beam energy is up to 4 MV per charge. Parameters of carbon ion beam generated and used for semiconductor samples irradiation during experiments for axial minority charge carriers lifetime control in various silicon bulk and epitaxial planar structures are presented. PB - JACoW Publishing CP - Geneva, Switzerland SP - 1489 EP - 1491 KW - radiation KW - laser KW - target KW - plasma KW - ion-source DA - 2021/08 PY - 2021 SN - 2673-5490 SN - 978-3-95450-214-1 DO - doi:10.18429/JACoW-IPAC2021-TUPAB057 UR - https://jacow.org/ipac2021/papers/tupab057.pdf ER -